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Scaling Issues and Design of MEMS - Jean Addington
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This accessible volume delivers a complete design methodology for microelectromechanical systems (MEMS). Focusing on the scaling of an autonomous micro-system, it explains the real-world … Más…

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Scaling Issues and Design of MEMS - Salvatore Baglio/ Salvatore Castorina/ Nicolo Savalli
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Salvatore Baglio/ Salvatore Castorina/ Nicolo Savalli:

Scaling Issues and Design of MEMS - libro nuevo

ISBN: 9780470034088

Scaling Issues and Design of MEMS ab 102.99 € als pdf eBook: . Aus dem Bereich: eBooks, Fachthemen & Wissenschaft, Wissenschaften allgemein, Medien > Bücher, Scaling Issues and Design of … Más…

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Scaling Issues and Design of MEMS - Salvatore Baglio, Salvatore Castorina, Nicolo Savalli
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ISBN: 9780470034088

Wiley-Interscience Microelectronics methodology; mems; design; accessible; systems; microelectromechanical; volume; autonomous microsystem; scaling; concepts; aspects; different; inherent… Más…

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Scaling Issues and Design of MEMS - Salvatore Baglio/ Salvatore Castorina/ Nicolo Savalli
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Salvatore Baglio/ Salvatore Castorina/ Nicolo Savalli:
Scaling Issues and Design of MEMS - libro nuevo

ISBN: 9780470034088

*Scaling Issues and Design of MEMS* / pdf eBook für 110.99 € / Aus dem Bereich: eBooks, Fachthemen & Wissenschaft, Wissenschaften, allgemein Medien > Bücher nein eBook als pdf eBooks > Fa… Más…

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Scaling Issues and Design of MEMS - Salvatore Baglio/ Salvatore Castorina/ Nicolo Savalli
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Salvatore Baglio/ Salvatore Castorina/ Nicolo Savalli:
Scaling Issues and Design of MEMS - libro nuevo

ISBN: 9780470034088

*Scaling Issues and Design of MEMS* / pdf eBook für 102.99 € / Aus dem Bereich: eBooks, Fachthemen & Wissenschaft, Wissenschaften, allgemein Medien > Bücher nein eBook als pdf eBooks > Fa… Más…

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Detalles del libro
Scaling Issues and Design of MEMS
Autor:
Título:
ISBN:

9780470034088

Detalles del libro - Scaling Issues and Design of MEMS


EAN (ISBN-13): 9780470034088
ISBN (ISBN-10): 0470034084
Año de publicación: 2008
Editorial: John Wiley & Sons
244 Páginas
Idioma: eng/Englisch

Libro en la base de datos desde 2009-12-28T06:15:37+01:00 (Madrid)
Página de detalles modificada por última vez el 2024-03-19T17:36:40+01:00 (Madrid)
ISBN/EAN: 9780470034088

ISBN - escritura alterna:
0-470-03408-4, 978-0-470-03408-8
Mode alterno de escritura y términos de búsqueda relacionados:
Autor del libro: nicolò, salvatore, baglio, savall, castor, nicolo
Título del libro: design issues

Datos del la editorial

Autor: Salvatore Baglio; Salvatore Castorina; Nicolo Savalli
Título: Scaling Issues and Design of MEMS
Editorial: Wiley-Interscience; John Wiley & Sons
244 Páginas
Año de publicación: 2008-07-31
Idioma: Inglés
104,99 € (DE)
Not available (reason unspecified)

EA; E107; E-Book; Nonbooks, PBS / Chemie/Sonstiges; Nanotechnologie; Mikroelektromechanik; Nanomaterialien; Nanomaterials; Nanotechnologie; Nanotechnology; Allg. Nanotechnologie; Nanomaterialien; BB

Preface. Introduction. 1. Scaling of MEMS. 1.1 Introduction to Scaling Issues. 1.2 Examples of Dimensional Scaling Potentials. 1.2.1 Scaling effects on a cantilever beam. 1.2.2 Scaling of electrostatic actuators. 1.2.3 Scaling of thermal actuators. 1.3 Motivation, Fabrication and Scaling of MEMS. 1.4 Scaling as a Methodological Approach. References. 2. Scaling of Microactuators - an Overview. 2.1 Electrostatic Actuators. 2.1.1 Transverse combs modelling. 2.1.2 Lateral combs modelling. 2.2 Magnetic Transducers. 2.2.1 Magnetic actuators. 2.2.2 Ferromagnetic transducers. 2.3 Thermal Actuators. 2.3.1 Thermomechanical actuators. Acknowledgements. References. 3. Scaling of Thermal Sensors. 3.1 Thermoelectric Sensors. 3.2 Application: Dew-Point Relative Humidity Sensors. 3.2.1 Device structures and operating principles. 3.2.2 Device modelling and simulations. 3.2.3 Device design. 3.3 Conclusions. Acknowledgements. References. 4. Inductive Sensors for Magnetic Fields. 4.1 Inductive Microsensors for Magnetic Particles. 4.1.1 Integrated inductive sensors. 4.1.2 Planar differential transformer. 4.1.3 Signal-conditioning circuits. 4.1.4 Simulation of the planar differential transformer. 4.1.5 Experimental results. 4.2 Magnetic Immunoassay Systems. Acknowledgements. References. 5. Scaling of Mechanical Sensors. 5.1 Introduction. 5.2 Device Modelling and Fabrication Processes. 5.2.1 Fabrication processes. 5.2.2 Devices modelling. 5.2.3 Accelerometers. 5.2.4 Resonant mass sensors. 5.3 Experimental Device Prototypes. 5.3.1 CMOS devices. 5.3.2 SOI devices. 5.3.3 Finite element modelling. 5.4 Scaling Issues on Microaccelerometers and Mass Sensors. 5.5 Some Experimental Results. 5.6 Vibrating Microgyroscopes. 5.6.1 Coupled vibratory gyroscopes. Acknowledgements. References. 6. Scaling of Energy Sources. 6.1 Introduction. 6.2 Energy Supply Strategies for Autonomous Microsystems. 6.2.1 Use of microlenses in photothermomechanical actuation. 6.2.2 Technologies, materials and design of photothermomechanical actuators. 6.3 Photothermomechanical and Photothermoelectric Strategies for Highly Efficient Power Supply of Autonomous Microsystems. 6.3.1 Photothermoelectric power generation. 6.4 Efficiency of the Combined Energy Supply Strategy 166. References. 7. Technologies and Architectures for Autonomous MEMS Microrobots. 7.1 Design Issues in Microrobots. 7.2 A Microrobot Architecture Based on Photothermal Strategy. 7.3 A Microrobot as a Paradigm for the Analysis of Scaling in Microsystems. References. 8. Moving towards the Nanoscale. 8.1 Semiconductor-Based Nano-Electromechanical Systems. 8.2 Nanofabrication Facilities. 8.3 Overview of Nanosensors. 8.3.1 Use of AFM for materials and nanodevices characterization. 8.3.2 Scanning thermal microscopy (SThM). 8.3.3 Scanning Hall probe microscopy. 8.3.4 Mechanical resonant immunospecific biological detector. 8.3.5 Micromechanical sensor for differential detection of nanoscale motions. 8.3.6 Nanomagnetic sensors. 8.3.7 Nano-wire piezoresistors. 8.3.8 Nanometre-scale mechanical resonators. 8.3.9 Electric charge mechanical nanosensor. 8.4 Concluding Remarks. References. 9. Examples of Scaling Effects Analysis - DIEES-MEMSLAB. 9.1 Introduction. 9.2 Examples of Scaling Cantilever Beam Devices. 9.3 DIEES-MEMSLAB-Tutorial. 9.3.1 Introduction. 9.3.2 Descriptions of the microstructures and analytical methods. 9.4 Conclusions. References. 10. Concluding Remarks. Index.

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