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CMOS Cantilever Sensor Systems : Atomic Force Microscopy and Gas Sensing Applications - D. Lange
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D. Lange:

CMOS Cantilever Sensor Systems : Atomic Force Microscopy and Gas Sensing Applications - Pasta blanda

2010, ISBN: 3642077285

[EAN: 9783642077289], Neubuch, [SC: 0.0], [PU: Springer Berlin Heidelberg], ATOMICFORCECMOSCOMPATIBLEMICROMACHINING; CHEMICAL SENSOR; SENSORS; MICROSCOPY, Druck auf Anfrage Neuware - This… Más…

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CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications - libro nuevo

ISBN: 9783642077289

This book is intended for scientists and engineers in the field of micro- and nano­ electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-ba… Más…

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CMOS Cantilever Sensor Systems Atomic Force Microscopy and Gas Sensing Applications - Lange, D.; Baltes, H.; Brand, O.
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Lange, D.; Baltes, H.; Brand, O.:
CMOS Cantilever Sensor Systems Atomic Force Microscopy and Gas Sensing Applications - Pasta blanda

2010

ISBN: 3642077285

Softcover reprint of the original 1st ed. 2002 Kartoniert / Broschiert Wissenschaftliche Standards, Normung usw., Angewandte Physik, Ingenieurswesen, Maschinenbau allgemein, Nanotechnol… Más…

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CMOS Cantilever Sensor Systems Atomic Force Microscopy and Gas Sensing Applications - Lange, D.; Baltes, H.; Brand, O.
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Lange, D.; Baltes, H.; Brand, O.:
CMOS Cantilever Sensor Systems Atomic Force Microscopy and Gas Sensing Applications - Pasta blanda

2010, ISBN: 3642077285

Softcover reprint of the original 1st ed. 2002 Kartoniert / Broschiert Wissenschaftliche Standards, Normung usw., Angewandte Physik, Ingenieurswesen, Maschinenbau allgemein, Nanotechnol… Más…

Gastos de envío:Versandkostenfrei innerhalb der BRD. (EUR 0.00) MARZIES.de Buch- und Medienhandel, 14621 Schönwalde-Glien
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CMOS Cantilever Sensor Systems - D. Lange; O. Brand; H. Baltes
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D. Lange; O. Brand; H. Baltes:
CMOS Cantilever Sensor Systems - Pasta blanda

2010, ISBN: 9783642077289

Atomic Force Microscopy and Gas Sensing Applications, Buch, Softcover, Softcover reprint of the original 1st ed. 2002, [PU: Springer Berlin], Springer Berlin, 2010

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Detalles del libro
CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications

This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities such as forces and mass changes. The book is divided into three parts. First fabrication aspects and the mechanisms of cantilever resonators are introduced. Of the possible driving and sensing mechanisms, electrothermal and magnetic excitation, as well as piezoresistive detection and the use of MOS transistors for the deflection detection are introduced. This is followed by two application examples: The use of resonant cantilevers for the mass-sensitive detection of volatile organic compounds, and force sensor arrays for parallel Scanning Atomic Force Microscopy (AFM) of large areas.

Detalles del libro - CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications


EAN (ISBN-13): 9783642077289
ISBN (ISBN-10): 3642077285
Tapa dura
Tapa blanda
Año de publicación: 2010
Editorial: Springer Berlin
152 Páginas
Peso: 0,240 kg
Idioma: eng/Englisch

Libro en la base de datos desde 2011-09-23T09:17:34+02:00 (Madrid)
Página de detalles modificada por última vez el 2023-05-26T16:30:55+02:00 (Madrid)
ISBN/EAN: 9783642077289

ISBN - escritura alterna:
3-642-07728-5, 978-3-642-07728-9
Mode alterno de escritura y términos de búsqueda relacionados:
Autor del libro: baltes, brand, lange
Título del libro: sensors


Datos del la editorial

Autor: D. Lange; O. Brand; H. Baltes
Título: Microtechnology and MEMS; CMOS Cantilever Sensor Systems - Atomic Force Microscopy and Gas Sensing Applications
Editorial: Springer; Springer Berlin
142 Páginas
Año de publicación: 2010-12-04
Berlin; Heidelberg; DE
Impreso en
Idioma: Inglés
106,99 € (DE)
109,99 € (AT)
118,00 CHF (CH)
POD
VIII, 142 p.

BC; Hardcover, Softcover / Technik/Maschinenbau, Fertigungstechnik; Nanotechnologie; Verstehen; Atomic force microscopy; CMOS compatible micromachining; Cantilever; Chemical sensors; Sensor; Sensors; microscopy; Nanotechnology; Microsystems and MEMS; Applied and Technical Physics; Control, Robotics, Automation; Technology and Engineering; Measurement Science and Instrumentation; Elektronik; Angewandte Physik; Regelungstechnik; Ingenieurswesen, Maschinenbau allgemein; Wissenschaftliche Standards, Normung usw. BB

This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities such as forces and mass changes. The book is divided into three parts. First fabrication aspects and the mechanisms of cantilever resonators are introduced. Of the possible driving and sensing mechanisms, electrothermal and magnetic excitation, as well as piezoresistive detection and the use of MOS transistors for the deflection detection are introduced. This is followed by two application examples: The use of resonant cantilevers for the mass-sensitive detection of volatile organic compounds, and force sensor arrays for parallel Scanning Atomic Force Microscopy (AFM) of large areas.
This book describes a vital measuring principle for analysing integrated circuits with a nano-electro-mechanical system Includes supplementary material: sn.pub/extras

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